Computer Devices Laboratory

/ Kazuyuki Saito / Professor
/ Nan Jian Wu / Visiting Associate Professor
/ Yasuhiro Hisada / Assistant Professor

The Computer Devices Laboratory focuses on education and research on VLSI technologies, devices, and their related area. The main activities are:

1. Education:
   • Physics of Semiconductor Devices
   • Electric Circuit, Electronic Circuit
   • Principles of VLSI Device and Process Technologies for the Undergraduates, and
   • ULSI Technologies for the Graduates

2. Research: The main objectives of the research in CDL are to develop new environments for VLSI design, diagnoses, and manufacturing. These will be intelligent manufacturing for VLSIs including a statistical representation, a physical representation, and an expert system representation of the environments. And the objects of representation are not retricted in the devices and process technologies, but will cover from the manufacturing system modeling to the yield enhancement and reliablity of VLSI.

   The research projects have been performed in the CDL are as follows:

   • Research on Parameter Extraction for VLSI Simulation; with NTT LSI Laboratories,
   • Research on Computer Engineering Education System,
   • Research on Defect Analysis of the Implanted Silicon Layer; with NTT Laboratories,(completed)
   • Optimization of Resources for VLSI Production; with Fujitsu Tohoku Electronics,
   • Cooperative Co-evolutionally Hardware and its Application; Ministry of Education Research Fund,
   • A New Approach for Logic Design; with Fujitsu Tohoklu Electronics,
   • Wavelet Analyses on the Electrocardiogram; with Fukushima Medical University.

Prof. Kazuyuki Saito:
In these years, his research interest is going toward the computer integrated manufacturing system. His understanding of CIM is the Centralized Informantion Manufacturing. On this concept, he developed a novel yield modeling applying to the Yield Enhancement, Topography Simulator, a Factory Model using Queueing Model, A Factory Model uisng Petri Net, a Local Area Network in the VLSI Factory and its application on the Quality Enhancement of the VLSI production. He is now developing a Production Scheduling System with a novel algorithm.

Prof. Yasuhiro Hisada:
His interest is a computer simulation of semiconductor crystal growth process. The quarity and yield of LSI is influenced by the quarity of the semiconductor crystal. He is also interested in biometrics. Now he has been developed measurement and analysis system of a living body signal. This research is related to research of LSI for signal processing and analog circuit and sensor. In addition, this research will become the base of ultimate interface computer and human.

Prof. Nan Jian Wu:
A visiting associate professor. (2000.4 - 2001.1) Now he is working for the Chinese Academy of Science, Beijing.

Refereed Journal Papers

1. Sumika Arima and Kazuyuki Saito., PetriNet Simulation of Manufacturing Systems Considering Multiple Machines, Operators, and Maintenance for a Product-MIx. Proc. The Ninth International Symposium on Semiconductor Manufacturing, 2000.

Refereed Proceeding Papers

1. Sumika Arima and Kazuyuki Saito., Petri Net Simulation of Manufacturing Systems Considering Multiple Machines, Operators, and Maintenance for a Product-Mix. Proc. The Ninth International Symposium on Semiconductor Manufacturing, pp. 339 - 342, UCS, IEEE EDS, and SEMI, September, 2000.

   A manufacturing system was modeled using a Petri net description, and the model was analyzed using a newly developed simulator. The simulator can consider concurrent events, conflict events, and stochastic events. This work first demostrated a Petri net simulation which, inconclusion, is a powerful tool for product-mix analyses.

2. N.-J. Wu, K.Saito, and H. Yasunaga., Analog Computation Using a Quantum-Dot Cell Network. 2000 International Conf. Solid State Devices and Materials, Japanese Applied Physics Society, IEEE EDS, IEICE, 2000.

   A novel analog-computation system using a quantum-dot cell network is proposed to solve some complex problems. Analog computation is a promising method for solvinga mathematical problem by applying an analogy of a physical system to the problem. We examined a graph 3-colorbility problem onto the Quantum-Dot cell network so that the single-electron configuration of the network at ground state corresponds to one of solutions of the problem. The results demostrate that the analog computation can become one important approach to solving complex problem.

Unrefereed Papers

1. Sumika Arima and Kazuyuki Saito., PetriNet Simulation of Manufacturing System Considering Accident and Maintenance. IEICE Tohoku 2000 Conf., 2000.

2. Sumika Arima and Kazuyuki Saito., Petri Net Simulation of Manufacturing System Considering Accident and Maintenance. IEICE Tohoku 2000 Conf., 2000.

3. Nan-Jian Wu and Kazuyuki Saito., Analog Computation Using An Artificial Molecule Network. The Fukushima-Shanghai International Symposium on Computer and Information Technology, 2000.

1. Kazuyuki Saito et al., Fabrication Technology of Semiconductor Devices. register No. 2809393, Japan, 2000.

2. Kazuyuki Saito et al., LSI Topograhy Simulation Method. register No. 2787315, Japan, 2000.

3. Kazuyuki Saito et al., LSI Topograhy Simulation Method. register No. 2787316, Japan, 2000.

4. Kazuyuki Saito et al., Simulation Method of LSI Production Facility. register No. 2802393, Japan, 2000.

5. Kazuyuki Saito et al., VLSI Pad and its Fabrication Method. Japan, 2000. register No. 2810945.

6. Kazuyuki Saito et al., Triangular Grid Generation Method. United State, 2000. register No. 1600.

7. Kazuyuki Saito et al., 3-D Topography Simulation Method of VLSI. United State, 2000. register No. 1603.

8. Kazuyuki Saito., LSI Process Improvement Method. Japan, 2000. register No. 2996359.

9. Kazuyuki Saito et al., 3-D VLSI Topography Simulation Method. United State, 2000. register No. 2613.